Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere
US5652428A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jan 22, 1996 |
| Grant date | Jul 29, 1997 |
| Priority date | — |
| Expiry date | Jan 22, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/881
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of use of a scanning probe microscope includes the step of mounting a probe to a scanning probe microscope in ambient atmosphere, the step of drawing on a surface of a standard sample by two-dimensionally scanning while keeping constant a tunnel current under feedback control of a distance between a standard sample and the probe, the step of applying pulse voltage between the probe and the standard sample while two-dimensionally scanning, with feedback control stopped at each scanning point, the step for obtaining drawn image of the surface of the standard sample again, comparing the obtained drawn image with the drawn image obtained in the step of drawing on the surface of the standard sample thereby determining cleanness of the probe, the step of repeating the step of pulse application and the step of determination of cleanness until the probe is cleaned, the step for replacing the standard sample by a sample for measurement after cleanness of the probe is confirmed, and the step of drawing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.