Method and dummy disc for uniformly depositing silicon nitride
US5658833A · kind A · utility
5Cited by
9References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 1996 |
| Grant date | Aug 19, 1997 |
| Priority date | — |
| Expiry date | Jan 30, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4401
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a process of fabricating an integrated circuit, a method for uniformly depositing silicon nitride by disposing a plurality of dummy discs beside the production wafers. The dummy discs are made of quartz or silicon carbide. Since the dummy discs can be used longer before been recycled, plenty dummy discs can be saved from disuse. Furthermore, the cost of the management and treatment of the dummy discs is great reduced in this way.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.