Ceramic electrostatic chuck with built-in heater
US5665260A · kind A · utility
44Cited by
6References
6Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 27, 1994 |
| Grant date | Sep 9, 1997 |
| Priority date | — |
| Expiry date | Dec 27, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.