Wafer scrubbing device
US5675856A · kind A · utility
55Cited by
20References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 14, 1996 |
| Grant date | Oct 14, 1997 |
| Priority date | — |
| Expiry date | Jun 14, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B23/505
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A wafer scrubbing device for cleaning the surfaces of a thin disk disposed on a stationary spin chuck employs a double brush arrangement whereby brush rotation induces rotation of the disk to be cleaned and whereby the speed differential between the constant rotational speed of the brushes and the variable rotational speed of the disk due to the relative position of the brushes on the disk causes the scrubbing of both surfaces and the edge of the disk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.