Patent assignee · US · COMPANY

Solid State Equipment LLC

3Patents
0Active
3Granted
28Portfolio score

Filing activity: Jun 14, 1996 → Apr 24, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US5675856A Wafer scrubbing device Physics 55 Expired
US6539952B2 Megasonic treatment apparatus Emerging Cross-Sectional Technologies 31 Expired
USRE36767E Wafer scrubbing device General 5 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.