Herman Itzkowitz
6Patents
4h-index
3Co-inventors
50Inventor score
Filing activity: Sep 3, 1980 → Aug 12, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5675856A | Wafer scrubbing device | Physics | 55 | Expired |
| US6539952B2 | Megasonic treatment apparatus | Emerging Cross-Sectional Technologies | 31 | Expired |
| US4362980A | Position error recovery and motor control system | Emerging Cross-Sectional Technologies | 15 | Expired |
| USRE36767E | Wafer scrubbing device | General | 5 | Expired |
| US10022745B2 | Apparatus for dual speed spin chuck | Electricity | 0 | Active |
| US9768041B2 | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.