Apparatus for examining target objects such as LCD panels
US5691764A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1995 |
| Grant date | Nov 25, 1997 |
| Priority date | — |
| Expiry date | Aug 3, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1309
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A probe apparatus incorporated into a lighting inspection system for LCD panels, includes a store section, a process section, and a transfer section interposed between them. An examination mechanism having a probe card is arranged in an examination area of the process section. Right and left alignment areas are formed so as to interpose the examination area, and right and left work tables on which the LCD panels are to be loaded, are arranged on the right and left alignment areas, respectively. The movement of the right and left work tables is controlled by a controller, and the LCD panels on the right and left work tables are alternately examined in the examination area by the examination mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.