Polishing apparatus including cloth cartridge connected to turntable
US5704827A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Oct 18, 1995 |
| Grant date | Jan 6, 1998 |
| Priority date | — |
| Expiry date | Oct 18, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/12
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polishing apparatus includes a detachable light weight cloth cartridge which shows little deformation under uneven loading during a polishing operation. Either mechanical or non-mechanical fixation of the cloth cartridge to a turntable is achieved. Mechanical fixation involves attaching the cloth cartridge to the turntable at peripheral and center sections of the cloth cartridge. Non-mechanical fixation involves attaching the cloth cartridge to the turntable by a vacuum arrangement. The assembly of the cloth cartridge and the turntable not only produces excellent flatness on polished semiconductor wafers by maintaining a level polishing surface, but also improves the production yield by preventing breakage of wafers during the polishing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.