Riichiro Aoki
10Patents
6h-index
20Co-inventors
62Inventor score
Filing activity: Oct 18, 1995 → Oct 31, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5679059A | Polishing aparatus and method | Electricity | 59 | Expired |
| US5704827A | Polishing apparatus including cloth cartridge connected to turntable | Performing Operations; Transporting | 48 | Expired |
| US5827110A | Polishing facility | Electricity | 41 | Expired |
| US5846335A | Method for cleaning workpiece | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6500051B1 | Polishing apparatus and method | Electricity | 12 | Expired |
| US6997782B2 | Polishing apparatus and a method of polishing and cleaning and drying a wafer | Electricity | 9 | Expired |
| US6221171A | Method and apparatus for conveying a workpiece | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6595220B2 | Apparatus for conveying a workpiece | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7198552B2 | Polishing apparatus | Electricity | 1 | Expired |
| US7708618B2 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.