Scanning probe microscope having automatic probe exchange and alignment

US5705814A · kind A · utility

Assignee

• Digital Instruments, Inc. · US

Inventors

• James M. Young · Ladera Ranch, US
• Craig Prater · Lompoc, US
• David Grigg · Midland School, US
• Charles Meyer · San Antonio, US
• William H. Hertzog · Lompoc, US
• John A. Gurley · Lompoc, US
• Virgil B. Elings · Lompoc, US

Key dates

• Filing date: Aug 30, 1995
• Grant date: Jan 6, 1998
• Expiry date: Aug 30, 2015

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/85
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A scanning probe microscope and method having automated exchange and precise alignment of probes, wherein one or more additional stored probes for installation onto a probe mount are stored in a storage cassette or a wafer, a selected probe is aligned to a detection system, and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signals from the probe detection system or by forming an optical image of the probe using a camera or similar technique and determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.