Method and apparatus for cleaning a throttle valve
US5707451A · kind A · utility
16Cited by
16References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 1995 |
| Grant date | Jan 13, 1998 |
| Priority date | — |
| Expiry date | May 25, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/905
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved method of in-situ cleaning a throttle valve in a CVD device and exhaust flow control apparatus for facilitating such cleaning. The throttle valve is repositioned such that it is juxtaposed in close proximity to the exhaust gas port of the reaction chamber. A plasma is then ignited in a cleaning gas mixture of nitrogen trifluoride, hexafluoroethane and oxygen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.