Stage device capable of applying a damping force to a movable member
US5714860A · kind A · utility
3Cited by
11References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 8, 1995 |
| Grant date | Feb 3, 1998 |
| Priority date | — |
| Expiry date | Nov 8, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45026
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage device comprises a base, a movable member movably provided on the base, a damping system for giving a damping force to the movable member, a position detector for detecting a position of the movable member with respect to the base, a deviation detector for obtaining a deviation of a position of the movable member from a target position of the movable member on the base on the basis of a result of the detection by the position detector and a damping control system for changing the damping force in accordance with the deviation detected by the deviation detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.