Patent · US Expired

Charging device for semiconductor processing installations

US5715929A · kind A · utility

6Cited by

5References

15Claims

0Family size

Assignee

Jenoptik Technologie GmbH · DE

Inventors

Werner Scheler · Jena, DE
Volker Schlehahn · Jena, DE
Peter Fabian · Alzenau, DE
Hans-Joachim Weske · Jena, DE

Key dates

Filing date	Apr 28, 1995
Grant date	Feb 10, 1998
Priority date	—
Expiry date	Apr 28, 2015

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/14
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The object of a charging device for semiconductor processing installations is to increase the flexibility of the charging process while excluding negative influences on dependability and clean room conditions. At least in a portion of the movement of a linearly movable part which is supported by a stationary part of a drive for transferring a transport object between two end positions, a gripper for the transport object being attached to the movable part, a rotating movement of the gripper is combined with the linear movement. The device is provided in particular for use in the fabrication of semiconductors.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.