Angular velocity sensor with built-in limit stops

US5721377A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Juergen Kurle · Reutlingen, DE
• Kurt Weiblen · Metzingen, DE
• Horst Muenzel · Reutlingen, DE
• Helmut Baumann · Gomaringen, DE
• Klaus Heyers · Reutlingen, DE
• Markus Lutz · Palo Alto, US

Key dates

• Filing date: Jul 22, 1996
• Grant date: Feb 24, 1998
• Expiry date: Jul 22, 2016

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In an angular velocity sensor, an acceleration sensor is arranged on a resonator formed of a multilayer substrate and attached to a resonating bar. The multilayer substrate includes a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer. An excitor causes the resonator to vibrate while a limit stop, configured out of the multilayer substrate, limits the movement of the resonator.