Protective collar for vacuum seal in a plasma etch reactor
US5722668A · kind A · utility
27Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 1994 |
| Grant date | Mar 3, 1998 |
| Priority date | — |
| Expiry date | Apr 29, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S277/913
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vacuum seal assembly that can be used in a plasma etch reactor to seal the chamber interior from the outside environment consists of a protective collar that is injection molded or machined of a high strength, high temperature and corrosion resistant thermoplastic material, the collar has an elastomeric gasket installed therein and is used in combination with a second elastomeric gasket to achieve a fluid-tight seal between two rigid surfaces made of silicon and quartz, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.