Eric Askarinam
11Patents
11h-index
16Co-inventors
61Inventor score
Filing activity: Apr 29, 1994 → Mar 30, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6054013A | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Electricity | 497 | Expired |
| US6095083A | Vacuum processing chamber having multi-mode access | Electricity | 461 | Expired |
| US6074512A | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Electricity | 189 | Expired |
| US6077384A | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Electricity | 175 | Expired |
| US6440221B2 | Process chamber having improved temperature control | Electricity | 61 | Expired |
| US6063233A | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Electricity | 50 | Expired |
| US6623596B1 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Electricity | 46 | Expired |
| US5722668A | Protective collar for vacuum seal in a plasma etch reactor | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6524432B1 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Electricity | 24 | Expired |
| US6454898B1 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Electricity | 17 | Expired |
| US6514376B1 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Electricity | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.