Automatic temperature controlling system
US5724825A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 1996 |
| Grant date | Mar 10, 1998 |
| Priority date | — |
| Expiry date | Sep 11, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67098
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to an automatic temperature controlling system for semiconductor process, when one of the chillers in the temperature controlling system is out of order, then another chiller will automatically take over the function of the broken one by using the second temperature controlling path. The automatic temperature controlling system includes: at least two chambers used for performing a process having first temperature controlling paths for providing coolant circulations while the system is in normal condition, and having a second temperature controlling path for providing at least one coolant circulation while the system is in abnormal condition; at least two chillers are respectively connected to the chambers for controlling the temperature of the chambers; a plurality of first normal-on valves are used to control the condition of the first temperature controlling paths; a plurality of second normal-on valves are used to control the condition of the first temperature controlling paths; and a plurality of pairs of normal-off valves are used to control the condition of the second temperature controlling paths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.