Yuichi Wada
60Patents
13h-index
96Co-inventors
87Inventor score
Filing activity: Aug 29, 1978 → Nov 21, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6488984B1 | Film deposition method and apparatus | Electricity | 228 | Expired |
| US5267607A | Substrate processing apparatus | Electricity | 94 | Expired |
| US5728276A | Treatment apparatus | Electricity | 38 | Expired |
| US5624536A | Processing apparatus with collimator exchange device | Electricity | 32 | Expired |
| US4451718A | Circuit breaker | Electricity | 26 | Expired |
| USD913979S1 | Inner shield for a substrate processing chamber | General | 25 | Active |
| US7464966B2 | Through-panel fixing device for piping member | Mechanical Engineering; Lighting; Heating | 25 | Expired |
| US6440282B1 | Sputtering reactor and method of using an unbalanced magnetron | Electricity | 23 | Expired |
| US4616203A | Electromagnetic contactor | Electricity | 20 | Expired |
| US6210539A | Method and apparatus for producing a uniform density plasma above a substrate | Electricity | 18 | Expired |
| US7075165B2 | Embedded waveguide detectors | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5584973A | Processing apparatus with an invertible collimator and a processing method therefor | Electricity | 17 | Expired |
| US7001788B2 | Maskless fabrication of waveguide mirrors | Physics | 14 | Expired |
| US4786770A | Switchgear | Electricity | 10 | Expired |
| US6066558A | Multilevel interconnection forming method for forming a semiconductor device | Electricity | 8 | Expired |
| US4539451A | Switch | Electricity | 7 | Expired |
| US4263574A | Slit type current limiting fuse | Electricity | 7 | Expired |
| US9190299B2 | Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium | Electricity | 5 | Active |
| US4628163A | Power switch | Electricity | 5 | Expired |
| US7101725B2 | Solution to thermal budget | Electricity | 4 | Expired |
| US4652707A | Power switch | Electricity | 4 | Expired |
| US4733319A | High-speed current limiting circuit breaker | Electricity | 4 | Expired |
| US4596909A | Electromagnetic contactor | Electricity | 3 | Expired |
| US6852626B1 | Film deposition method and apparatus | Electricity | 3 | Expired |
| US9816182B2 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.