Membrane for holding a probe tip in proper location
US5742174A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 1995 |
| Grant date | Apr 21, 1998 |
| Priority date | — |
| Expiry date | Nov 3, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06733
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and device for accurately mounting a probe in a probe card and for maintaining correct location of the probe tip as the probe is used for electronic testing of an IC pad. A membrane having a slot is attached to a support structure of a probe card. The probe tip is inserted into the slot and the probe is affixed to the membrane at the edges of the slot using silicon rubber. The probe is then mounted in the support structure which has a groove for receiving the probe. A distal end of the probe is bonded to the walls of the groove so that the probe is free to move vertically in the groove, but constrained from moving laterally to prevent side-buckling. The membrane and silicon rubber hold the probe tip in proper location during thermal treating of the probe card assembly. Once mounted in the probe card by this method, the probe and probe tip will maintain proper location as they are used for electronic testing of an IC pad. During testing, the probe tip and attached membrane are deflected from their initial position by force of contact with the IC pad. Upon completion of the test, the contact force is removed from the probe tip. The elasticity of the membrane causes the membr…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.