Method for depositing substituted fluorocarbon polymeric layers
US5759635A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 3, 1996 |
| Grant date | Jun 2, 1998 |
| Priority date | — |
| Expiry date | Jul 3, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D1/62
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In accordance with the invention, a method of depositing substituted fluorocarbon polymeric layers exhibiting a high degree of cross-linking is presented. The substituted fluorocarbon polymeric layers are formed of substituted fluorocarbon polymers in which the carbon functionality in standard fluorocarbon polymers is selectively replaced with a substitute functionality, typically silicon, oxygen or nitrogen. Formation of a substituted fluorocarbon polymeric layer includes placing a substrate into a reactor and, while maintaining the reactor pressure below 100 torr, introducing a process gas into the reactor. Optionally, the substrate is biased. The process gas is then ionized thereby depositing the substituted fluorocarbon polymeric layer on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.