Inventor · Carlsbad, CA, US

Mark A. Logan

16Patents
11h-index
15Co-inventors
69Inventor score

Filing activity: Feb 17, 1987 → Dec 23, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US4976996A Chemical vapor deposition reactor and method of use thereof Electricity 591 Expired
US5294778A CVD platen heater system utilizing concentric electric heating elements Chemistry; Metallurgy 562 Expired
US6395150B1 Very high aspect ratio gapfill using HDP Electricity 349 Expired
US5104482A Simultaneous glass deposition and viscoelastic flow process Emerging Cross-Sectional Technologies 51 Expired
US6427449B1 Compact volatile organic compound removal system Emerging Cross-Sectional Technologies 44 Expired
US5899077A Thermoelectric cooling/heating system for high purity or corrosive liquids Mechanical Engineering; Lighting; Heating 38 Expired
US5322646A Simulated tornado humidifier Emerging Cross-Sectional Technologies 29 Expired
US7806915B2 Apparatus and method for providing enhanced heat transfer from a body Mechanical Engineering; Lighting; Heating 21 Active
US5091219A Chemical vapor deposition method Electricity 17 Expired
US8808344B2 Apparatus and method for providing enhanced heat transfer from a body Mechanical Engineering; Lighting; Heating 13 Active
US9278024B2 Apparatus and method for providing enhanced heat transfer from a body Mechanical Engineering; Lighting; Heating 11 Active
US10195075B2 Apparatus and method for providing enhanced heat transfer from a body Mechanical Engineering; Lighting; Heating 11 Active
US5759635A Method for depositing substituted fluorocarbon polymeric layers Performing Operations; Transporting 7 Expired
US4845366A Semiconductor dopant vaporizer Electricity 4 Expired
US7514013B2 Devices with thermoelectric and thermodiodic characteristics and methods for manufacturing same Electricity 2 Active
US11311414B2 Apparatus and method for providing enhanced heat transfer from a body Mechanical Engineering; Lighting; Heating 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.