Aluminum nitride body having graded metallurgy

US5763093A · kind A · utility

Assignees

• International Business Machines Corporation · US
• Carborundum Corporation · US

Inventors

• Jon A. Casey · Poughkeepsie, US
• Carla N. Cordero · South Burlington, US
• Benjamin V. Fasano · New Windsor, US
• David B. Goland · Sopot, PL
• Robert Hannon · Land O' Lakes, US
• Jonathan H. Harris · Scottsdale, US
• Lester W. Herron · New Paltz, US
• Gregory M. Johnson · Poughkeepsie, US
• Niranjan M. Patel · Wappingers Falls, US
• Andrew Reitter · Poughkeepsie, US
• Subhash L. Shinde · Croton-on-Hudson, US
• Rao V. Vallabhaneni · Wappingers Falls, US
• Robert A. Youngman · Phoenix, US

Key dates

• Filing date: Jun 3, 1996
• Grant date: Jun 9, 1998
• Expiry date: Jun 3, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31678
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

Disclosed is an aluminum nitride body having graded metallurgy and a method for making such a body. The aluminum nitride body has at least one via and includes a first layer in direct contact with the aluminum nitride body and a second layer in direct contact with, and that completely encapsulates, the first layer. The first layer includes 30 to 60 volume percent aluminum nitride and 40 to 70 volume percent tungsten and/or molybdenum while the second layer includes 90 to 100 volume percent of tungsten and/or molybdenum and 0 to 10 volume percent of aluminum nitride.