Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus
US5764361A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 1996 |
| Grant date | Jun 9, 1998 |
| Priority date | — |
| Expiry date | Oct 21, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates an interferometer having a structure for suppressing measurement errors arising from leakage light by minimizing nonlinear errors due to the leakage light in a polarization beam splitter for splitting incident light into a first polarized light component and a second polarized light component, and apparatuses to which the interferometer is applied. The interferometer includes an adjustment mechanism for adjusting the angle of light incidence on the beam splitting surface of the polarization beam splitter such that the extinction ratio of the polarization beam splitter is minimized by using the dependence of the polarization beam splitter on the incident angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.