Inventor · Yokohama, JP

Kinya Kato

92Patents
23h-index
93Co-inventors
91Inventor score

Filing activity: Aug 29, 1983 → Dec 20, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6795169B2 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Physics 256 Expired
US5751452A Optical devices with high polymer material and method of forming the same Physics 207 Expired
US5162933A Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium Physics 186 Expired
US5748272A Method for making an optical device using a laser beam interference pattern Physics 148 Expired
US6618104B1 Optical device having reverse mode holographic PDLC and front light guide Physics 126 Expired
US5041224A Ion permeable membrane and ion transport method by utilizing said membrane Physics 117 Expired
US5729331A Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus Physics 91 Expired
US7209097B2 Optical device and three-dimensional display device Electricity 88 Expired
US5124769A Thin film transistor Electricity 79 Expired
US4889998A Apparatus with four light detectors for checking surface of mask with pellicle Physics 75 Expired
US5764361A Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus Physics 53 Expired
US5830643A Partially double-stranded oligonucleotide and method for forming oligonucleotide Chemistry; Metallurgy 43 Expired
US6469683B1 Liquid crystal optical device Electricity 41 Expired
US4999510A Apparatus for detecting foreign particles on a surface of a reticle or pellicle Physics 39 Expired
US4744663A Pattern position detection apparatus using laser beam Physics 36 Expired
US8314939B2 Reference sphere detecting device, reference sphere position detecting device, and three-dimensional-coordinate measuring device Physics 35 Active
US6714174B2 Optical device and three-dimensional display device Electricity 35 Expired
US4918504A Active matrix cell Physics 34 Expired
US5614988A Projection exposure apparatus and method with a plurality of projection optical units Physics 32 Expired
US4965630A Projection exposure apparatus Physics 31 Expired
US6462250B1 Method for decomposing halogenated aliphatic hydrocarbon compounds having adsorption process and apparatus for decomposition having adsorption means Chemistry; Metallurgy 28 Expired
US5850279A Alignment method, projection exposure method, and projection exposure apparatus Physics 25 Expired
US4636626A Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication Physics 24 Expired
US7336244B2 Optical device and three-dimensional display device Electricity 23 Expired
US4566762A Dual focus optical system Physics 22 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.