Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool
US5770948A · kind A · utility
18Cited by
1References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1996 |
| Grant date | Jun 23, 1998 |
| Priority date | — |
| Expiry date | Mar 19, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/06
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process by a polisher is provided with a sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process, a conductor coupled to the sensor for receiving the signal, the conductor fixed to the rotatable wafer carrier, a contact coupled to the conductor, the contact fixed to a stationary drive arm, and signal transfer means coupled to the contact for transferring the signal to a monitoring means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.