Patent · US Expired

Electrostatic-magnetic lens arrangement

US5780859A · kind A · utility

20Cited by

2References

22Claims

0Family size

Assignee

ACT Advanced Circuit Testing Gesellschaft · DE

Inventors

Hans-Peter Feuerbaum · Hersbruck, DE
Jürgen Frosien · Riemerling, DE
Koshi Ueda · Tokyo, JP
Toshimichi Iwai · Kanmaki, JP
Gerald Schonecker · Munich, DE

Key dates

Filing date	Jan 29, 1997
Grant date	Jul 14, 1998
Priority date	—
Expiry date	Jan 29, 2017

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2594
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.