Adjustable blade reticle assembly
US5780861A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 26, 1996 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Nov 26, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70066
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Apparatus and method for inhibiting the image of a transparent, undesired feature on a reticle from printing on semiconductor material. The apparatus includes a frame attachment connected to a pellicle frame that is attached to a reticle. A blade that is opaque to ultraviolet light is moveable across the frame attachment and may be positioned proximate the undesired feature of the reticle to prevent the printing of the image of the undesired feature on the semiconductor material. The blade may be positioned above the undesired feature to inhibit ultraviolet light from an illumination source from impinging upon the undesired feature. Alternatively, the blade may be positioned below the undesired feature to inhibit ultraviolet light passing through the undesired feature from impinging upon the semiconductor material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.