Coordinated cluster tool energy delivery system
US5784238A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 1, 1996 |
| Grant date | Jul 21, 1998 |
| Priority date | — |
| Expiry date | Aug 1, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02J7/34
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A coordinated cluster-tool energy distribution system provides a systems level approach to supplying all process energy needs for such industrial applications as those found in the semiconductor manufacturing industry, e.g. a single-wafer or multiple chamber processing chamber. The system is preferably provided as an integrated whole, rather than as a piece-meal collection of various energy distribution elements. The system comprises a shared DC bus that provides load diversity at lower energy levels, eliminates power supply components and/or minimizes the operating capacity of such components, and provides a lower installed cost; a common rectifier/filter or switcher power supply front end that lowers overall system cost, eliminates redundant power supply components, and provides a smaller system form factor; and (optionally) an energy storage device, such as a battery, capacitor, or flywheel, that reduces peak demand, thereby allowing smaller feeder circuits and a smaller energy source, and further providing ride through protection against brown-outs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.