Eric A. Nering
10Patents
9h-index
8Co-inventors
61Inventor score
Filing activity: Sep 11, 1986 → Dec 10, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6448537B1 | Single-wafer process chamber thermal convection processes | Emerging Cross-Sectional Technologies | 236 | Expired |
| US6082951A | Wafer cassette load station | Emerging Cross-Sectional Technologies | 51 | Expired |
| US4679268A | Method and apparatus for burning solid waste products using a plurality of multiple hearth furnaces | Mechanical Engineering; Lighting; Heating | 46 | Expired |
| US6270306A | Wafer aligner in center of front end frame of vacuum system | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6280134A | Apparatus and method for automated cassette handling | Emerging Cross-Sectional Technologies | 30 | Expired |
| US6050891A | Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment | Emerging Cross-Sectional Technologies | 26 | Expired |
| US5784238A | Coordinated cluster tool energy delivery system | Electricity | 25 | Expired |
| US6309163A | Wafer positioning device with storage capability | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6524051B2 | Wafer positioning device with storage capability | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6530734B2 | Methods and apparatus for positive wafer process status identification during semiconductor wafer processing | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.