Inventor · Moss Beach, CA, US

Eric A. Nering

10Patents
9h-index
8Co-inventors
61Inventor score

Filing activity: Sep 11, 1986 → Dec 10, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6448537B1 Single-wafer process chamber thermal convection processes Emerging Cross-Sectional Technologies 236 Expired
US6082951A Wafer cassette load station Emerging Cross-Sectional Technologies 51 Expired
US4679268A Method and apparatus for burning solid waste products using a plurality of multiple hearth furnaces Mechanical Engineering; Lighting; Heating 46 Expired
US6270306A Wafer aligner in center of front end frame of vacuum system Emerging Cross-Sectional Technologies 34 Expired
US6280134A Apparatus and method for automated cassette handling Emerging Cross-Sectional Technologies 30 Expired
US6050891A Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment Emerging Cross-Sectional Technologies 26 Expired
US5784238A Coordinated cluster tool energy delivery system Electricity 25 Expired
US6309163A Wafer positioning device with storage capability Emerging Cross-Sectional Technologies 18 Expired
US6524051B2 Wafer positioning device with storage capability Emerging Cross-Sectional Technologies 9 Expired
US6530734B2 Methods and apparatus for positive wafer process status identification during semiconductor wafer processing Emerging Cross-Sectional Technologies 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.