Composition and process using ester solvents for fabricating metal oxide films and electronic devices including the same
US5788757A · kind A · utility
3Cited by
3References
27Claims
0Family size
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Key dates
| Filing date | Dec 23, 1996 |
| Grant date | Aug 4, 1998 |
| Priority date | — |
| Expiry date | Dec 23, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/1279
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A metal organic liquid precursor solution includes metal organic complexes dispersed in an ester solvent. The ester solvent has medium length carbon chains to prevent the precipitation of strongly electropositive metals in solution. A liquid precursor solution is used to make thin film metal oxides of uniform thickness and consistent quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.