Film removal by chemical transformation and aerosol clean
US5792275A · kind A · utility
22Cited by
9References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 6, 1995 |
| Grant date | Aug 11, 1998 |
| Priority date | — |
| Expiry date | Jun 6, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A film layer not susceptible to aerosol cleaning is removed from a surface by converting the film layer into a film susceptible to aerosol cleaning, and aerosol jet cleaning the converted film and any contaminants. The aerosol jet can be moved in relation to the surface to provide thorough cleaning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.