Electrostatic chuck with polymeric impregnation and method of making
US5800871A · kind A · utility
43Cited by
18References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 1996 |
| Grant date | Sep 1, 1998 |
| Priority date | — |
| Expiry date | Aug 16, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31699
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck includes a pedestal having a metallic upper surface, and a layer of a porous dielectric material formed on said upper surface of the pedestal. The dielectric layer is impregnated with a plasma-resistant sealant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.