Inventor · Livermore, CA, US

Douglas A. Buchberger, Jr.

121Patents
32h-index
139Co-inventors
93Inventor score

Filing activity: Jan 23, 1992 → Feb 9, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6054013A Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density Electricity 497 Expired
US9741546B2 Symmetric plasma process chamber Electricity 365 Active
US8937800B2 Electrostatic chuck with advanced RF and temperature uniformity Electricity 289 Active
US6252354A RF tuning method for an RF plasma reactor using frequency servoing and power, voltage, current or DI/DT control Electricity 228 Expired
US6074512A Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners Electricity 189 Expired
US6900596B2 Capacitively coupled plasma reactor with uniform radial distribution of plasma Electricity 182 Expired
US6077384A Plasma reactor having an inductive antenna coupling power through a parallel plate electrode Electricity 175 Expired
US5916689A Electrostatic chuck with an impregnated, porous layer that exhibits the Johnson-Rahbeck effect Emerging Cross-Sectional Technologies 160 Expired
US8633423B2 Methods and apparatus for controlling substrate temperature in a process chamber Emerging Cross-Sectional Technologies 121 Active
US5874361A Method of processing a wafer within a reaction chamber Electricity 110 Expired
US5187454A Electronically tuned matching network using predictor-corrector control system Electricity 109 Expired
US7196283B2 Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface Electricity 91 Expired
US6894245B2 Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Electricity 70 Expired
US6586886B1 Gas distribution plate electrode for a plasma reactor Electricity 68 Expired
US5684669A Method for dechucking a workpiece from an electrostatic chuck Electricity 67 Expired
US5392018A Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Electricity 61 Expired
US6024826A Plasma reactor with heated source of a polymer-hardening precursor material Electricity 56 Expired
US7030335B2 Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression Electricity 53 Expired
US6165311A Inductively coupled RF plasma reactor having an overhead solenoidal antenna Electricity 50 Expired
US6063233A Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna Electricity 50 Expired
US6623596B1 Plasma reactor having an inductive antenna coupling power through a parallel plate electrode Electricity 46 Expired
US5574410A Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits Electricity 43 Expired
US5800871A Electrostatic chuck with polymeric impregnation and method of making Emerging Cross-Sectional Technologies 43 Expired
US7649729B2 Electrostatic chuck assembly Electricity 41 Active
US7968469B2 Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity Electricity 39 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.