Power management system for a semiconductor processing facility
US5801961A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1996 |
| Grant date | Sep 1, 1998 |
| Priority date | — |
| Expiry date | Dec 3, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Semiconductor processing tools in a semiconductor processing facility are coupled to communicate with a power management system. The power management system monitors the power consumption status of each of the semiconductor processing tools. Using the power consumption status of each of the semiconductor processing tools, the power management system stages the operation of the semiconductor processing tools so as to maintain the power consumption of the semiconductor processing facility below a predefined maximum power consumption. Limiting the power consumption to less than the predefined maximum power consumption reduces the per die processing costs without incurring the expense of building a new semiconductor processing facility or without modifying the semiconductor processing tools for larger batch sizes or for greater throughput.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.