Inventor · Fremont, CA, US

Steven C. Beese

5Patents
3h-index
5Co-inventors
46Inventor score

Filing activity: Dec 3, 1996 → Apr 4, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US5801961A Power management system for a semiconductor processing facility Electricity 14 Expired
US8562745B2 Stable wafer-carrier system Chemistry; Metallurgy 6 Active
US8610033B1 Rapid thermal process reactor utilizing a low profile dome Electricity 3 Active
US9441295B2 Multi-channel gas-delivery system Emerging Cross-Sectional Technologies 2 Active
US9240513B2 Dynamic support system for quartz process chamber Mechanical Engineering; Lighting; Heating 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.