Ceramic susceptor with embedded metal electrode and brazing material connection
US5817406A · kind A · utility
36Cited by
6References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 1996 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Jan 24, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24926
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A ceramic susceptor with an embedded metal electrode. The metal electrode has multiple apertures, and the ceramic material is cross-linked through the apertures. An electrical connection to the electrode protects the electrode from the environment in the processing chamber. The ceramic may be aluminum nitride, and the metal electrode may be a mesh of molybdenum wires. To form the electrical connection, the susceptor may be heated until an eutectic forms between a conductive connector and the metal electrode. Alternately, a brazing material may be placed between the metal layer and a conductive connector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.