Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck
US5818682A · kind A · utility
24Cited by
10References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 13, 1996 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Aug 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus which predicts an optimal period over which a dechucking voltage is applied to an electrostatic chuck to achieve dechucking of a workpiece therefrom. Specifically, the method is implemented as a software program that is executed by a conventional computer. The method applies an optimal dechucking voltage for an optimal dechucking period to dechuck the workpiece. To avoid charge accumulation on the electrostatic chuck when processing a succession of workpieces, the chucking and dechucking voltages reverse polarity after each workpiece is dechucked.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.