David H. Loo
5Patents
4h-index
10Co-inventors
50Inventor score
Filing activity: Aug 13, 1996 → May 16, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5818682A | Method and apparatus for optimizing a dechucking period used to dechuck a workpiece from an electrostatic chuck | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6625003B2 | Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck | Electricity | 15 | Expired |
| US9818585B2 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Electricity | 6 | Active |
| US6875927B2 | High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications | Electricity | 4 | Expired |
| US8900471B2 | In situ plasma clean for removal of residue from pedestal surface without breaking vacuum | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.