Patent · US Expired

Method and apparatus for testing the function of microstructure elements

US5834773A · kind A · utility

19Cited by

4References

19Claims

0Family size

Assignee

Ebetech Electron-Beam Technology Vertriebs GmbH · DE

Inventors

Matthias Brunner · Tauberbischofsheim, DE
Hans-Peter Feuerbaum · Hersbruck, DE
Jürgen Frosien · Riemerling, DE

Key dates

Filing date	Jun 6, 1996
Grant date	Nov 10, 1998
Priority date	—
Expiry date	Jun 6, 2016

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/305
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a method as well as to apparatus for testing the function of microstructure elements, wherein the microstructure element is driven for testing the emission and/or mechanical properties and the corpuscles emitted or reflected by it are detected and evaluated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.