High temperature susceptor
US5837058A · kind A · utility
505Cited by
13References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 1996 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Jul 12, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4581
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A susceptor with improved resistance to thermal cycling and chemical attack between processing and cleaning cycles. The susceptor comprises a top surface is surrounded by a lip, the lip having a beveled inner side, a top side, an outer side, a first rounded edge between the top side and the outer side, a second rounded edge between the top side and the inner side, and a third rounded edge between the inner side and the top surface. The susceptor comprises a body of graphite covered by a coating of aluminum nitride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.