Radiation control system
US5837978A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1996 |
| Grant date | Nov 17, 1998 |
| Priority date | — |
| Expiry date | Dec 19, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B40/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A control system for a blind microwave radiation tool a workpiece is described. The controlled system automatically tunes the cavity containing the workpiece. The control system automatically controls the temperature of the workpiece according to a predetermined temperature versus time schedule. Control system automatically determines when the workpiece has reached a particular predetermined physical condition. To achieve these results the control system automatically monitors applied power, reflected power or current temperature and automatically controls the microwave antennae location and the cavity short location in order to maintain the cavity in resonance and to determine when to exit without operator intervention. Control system can run on a small computer and is useful for automatically curing polyamic acid to polyimide to a predetermined percent cure automatically without operator intervention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.