Method for automated energy dose measurement and adjustment for a photoaligner
US5848382A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 27, 1997 |
| Grant date | Dec 8, 1998 |
| Priority date | — |
| Expiry date | Jun 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70558
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A Visual Basic software program to automate the procedures required for energy dose verification and adjustment of the ASM photoaligner. The software program has the capability of manipulating the ASM photoaligner through a resident software routine of the photoaligner. In addition, the software program has a user interface which prompts the operator for inputs and instructs the operator on what is required to perform the energy dose calibration. This ensures a reproducible procedure regardless of the photoaligner being tested or the operator doing the testing. Automating this procedure allows changing the photoaligner energy dose through the ASM Machine Constants (values stored in the ASM photoaligner that control the operation of the photoaligner). If the input data is out of specification the program will either reference a trouble shooting guide or request that the specific procedure be repeated for verification. After collecting the data from the operator, the program makes the necessary calculations and compares the results to a predefined data base which contains the specification limits for each of the individual photoaligners. Besides saving time, automating these procedur…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.