Method for developing treatment
US5854953A · kind A · utility
38Cited by
3References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 7, 1997 |
| Grant date | Dec 29, 1998 |
| Priority date | — |
| Expiry date | May 7, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a method for developing treatment, in which a developing solution is supplied to an object to be treated for performing a developing treatment, comprising the steps of supplying pure water onto a surface of said treating object for forming a pure water film on the surface of the treating object, and supplying a developing solution onto the surface of the treating object having the pure water film formed thereon in the preceding step. The particular method of the present invention permits markedly suppressing a defective development.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.