Norio Semba
15Patents
12h-index
26Co-inventors
70Inventor score
Filing activity: Jun 29, 1995 → Sep 1, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5826129A | Substrate processing system | Electricity | 472 | Expired |
| US6033475A | Resist processing apparatus | Physics | 59 | Expired |
| US5854953A | Method for developing treatment | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6063439A | Processing apparatus and method using solution | Emerging Cross-Sectional Technologies | 35 | Expired |
| US5938847A | Method and apparatus for coating a film on an object being processed | Performing Operations; Transporting | 32 | Expired |
| US5944894A | Substrate treatment system | Electricity | 26 | Expired |
| US6217657A | Resist processing system having process solution deaeration mechanism | Physics | 21 | Expired |
| US6015066A | Liquid supplying device | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6368776B1 | Treatment apparatus and treatment method | Electricity | 21 | Expired |
| US6333003A | Treatment apparatus, treatment method, and impurity removing apparatus | Electricity | 20 | Expired |
| US6268013A | Coating a resist film, with pretesting for particle contamination | Performing Operations; Transporting | 19 | Expired |
| US5866307A | Resist processing method and resist processing system | Physics | 17 | Expired |
| US6133981A | Processing system | Electricity | 11 | Expired |
| US6332724A | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6338474B1 | Air feeder provided with by-pass bypassing cooling section, substrate processing apparatus including the same, and air supply method | Electricity | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.