Very narrow band laser
US5856991A · kind A · utility
136Cited by
7References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 4, 1997 |
| Grant date | Jan 5, 1999 |
| Priority date | — |
| Expiry date | Jun 4, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/139
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A very narrow band excimer laser. The very narrow bandwidth is achieved by using an etalon as an output coupler in combination with a line narrowing element located at the rear of the laser. Preferred embodiments are capable of producing 10 mJ laser pulses at 1000 Hz with a 95% integral bandwidth of less than 1.5 pm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.