Electron microscope
US5866905A · kind A · utility
35Cited by
15References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 1996 |
| Grant date | Feb 2, 1999 |
| Priority date | — |
| Expiry date | Jul 26, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2807
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.