Inventor · Fuchu, JP

Ruriko Tsuneta

18Patents
8h-index
32Co-inventors
68Inventor score

Filing activity: Jun 20, 1994 → Jan 11, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US6570156B1 Autoadjusting electron microscope Emerging Cross-Sectional Technologies 49 Expired
US5866905A Electron microscope Electricity 35 Expired
US6051834A Electron microscope Electricity 32 Expired
US6838667B2 Method and apparatus for charged particle beam microscopy Electricity 30 Expired
US5453617A Electron microscope for specimen composition and strain analysis and observation method thereof Electricity 19 Expired
US5650621A Electron microscope Electricity 17 Expired
US6888139B2 Electron microscope Emerging Cross-Sectional Technologies 14 Expired
US7372051B2 Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system Electricity 8 Active
US7372029B2 Scanning transmission electron microscope and scanning transmission electron microscopy Electricity 8 Active
US7863564B2 Electric charged particle beam microscope and microscopy Electricity 6 Active
US8334519B2 Multi-part specimen holder with conductive patterns Electricity 5 Active
US7633064B2 Electric charged particle beam microscopy and electric charged particle beam microscope Electricity 5 Active
US8993961B2 Electric charged particle beam microscope and electric charged particle beam microscopy Electricity 4 Active
US7227144B2 Scanning transmission electron microscope and scanning transmission electron microscopy Electricity 4 Expired
US8442300B2 Specified position identifying method and specified position measuring apparatus Physics 3 Active
US7141790B2 Defect inspection instrument and positron beam apparatus Electricity 2 Expired
US9830524B2 Method for estimating shape before shrink and CD-SEM apparatus Electricity 2 Active
US8963102B2 Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.