Ruriko Tsuneta
18Patents
8h-index
32Co-inventors
68Inventor score
Filing activity: Jun 20, 1994 → Jan 11, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6570156B1 | Autoadjusting electron microscope | Emerging Cross-Sectional Technologies | 49 | Expired |
| US5866905A | Electron microscope | Electricity | 35 | Expired |
| US6051834A | Electron microscope | Electricity | 32 | Expired |
| US6838667B2 | Method and apparatus for charged particle beam microscopy | Electricity | 30 | Expired |
| US5453617A | Electron microscope for specimen composition and strain analysis and observation method thereof | Electricity | 19 | Expired |
| US5650621A | Electron microscope | Electricity | 17 | Expired |
| US6888139B2 | Electron microscope | Emerging Cross-Sectional Technologies | 14 | Expired |
| US7372051B2 | Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system | Electricity | 8 | Active |
| US7372029B2 | Scanning transmission electron microscope and scanning transmission electron microscopy | Electricity | 8 | Active |
| US7863564B2 | Electric charged particle beam microscope and microscopy | Electricity | 6 | Active |
| US8334519B2 | Multi-part specimen holder with conductive patterns | Electricity | 5 | Active |
| US7633064B2 | Electric charged particle beam microscopy and electric charged particle beam microscope | Electricity | 5 | Active |
| US8993961B2 | Electric charged particle beam microscope and electric charged particle beam microscopy | Electricity | 4 | Active |
| US7227144B2 | Scanning transmission electron microscope and scanning transmission electron microscopy | Electricity | 4 | Expired |
| US8442300B2 | Specified position identifying method and specified position measuring apparatus | Physics | 3 | Active |
| US7141790B2 | Defect inspection instrument and positron beam apparatus | Electricity | 2 | Expired |
| US9830524B2 | Method for estimating shape before shrink and CD-SEM apparatus | Electricity | 2 | Active |
| US8963102B2 | Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.