Inflatable elastomeric element for rapid thermal processing (RTP) system

US5870526A · kind A · utility

Assignee

• Steag AST · DE

Inventors

• Helmut Aschner · Beimerstetten, DE
• Helmut Merkle · Bethesda, US
• Ulrich Walk · Ulm, DE
• Dieter Zernickel · Ulm, DE

Key dates

• Filing date: Jul 17, 1997
• Grant date: Feb 9, 1999
• Expiry date: Jul 17, 2017

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67115
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A rapid thermal processing (RTP) chamber is disclosed, wherein a transparent plate and a body are sealed with a gas tight seal, and wherein the gas tight seal is activated by inflating an inflatable element.