Helmut Aschner
4Patents
4h-index
6Co-inventors
36Inventor score
Filing activity: Jul 17, 1997 → Nov 13, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6005226A | Rapid thermal processing (RTP) system with gas driven rotating substrate | Electricity | 72 | Expired |
| US6449428B2 | Gas driven rotating susceptor for rapid thermal processing (RTP) system | Chemistry; Metallurgy | 18 | Expired |
| US5870526A | Inflatable elastomeric element for rapid thermal processing (RTP) system | Electricity | 14 | Expired |
| US6752625B1 | Method and apparatus device for the heat treatment of substrates | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.