Inventor · Beimerstetten, DE

Helmut Aschner

4Patents
4h-index
6Co-inventors
36Inventor score

Filing activity: Jul 17, 1997 → Nov 13, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6005226A Rapid thermal processing (RTP) system with gas driven rotating substrate Electricity 72 Expired
US6449428B2 Gas driven rotating susceptor for rapid thermal processing (RTP) system Chemistry; Metallurgy 18 Expired
US5870526A Inflatable elastomeric element for rapid thermal processing (RTP) system Electricity 14 Expired
US6752625B1 Method and apparatus device for the heat treatment of substrates Electricity 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.