Apparatus for directly measuring component values within an RF circuit
US5872456A · kind A · utility
9Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 1997 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | May 23, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2822
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for directly measuring the value of a component within an RF circuit (e.g., an RF matching network within a semiconductor wafer processing system). Specifically, the apparatus applies a low frequency signal (e.g., a 1 KHz) across one or more of the components within an RF circuit using a bridge circuit that is sufficiently isolated from the RF signal to accomplish accurate measurements of the component. The apparatus monitors the amplitude of the low frequency signal across the component. The amplitude of the low frequency signal is indicative of the value of the component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.